Odgovor: |
Knjige:
- Kurajica, Stanislav. Uvod u nanotehnologiju. Zagreb : Hrvatsko društvo kemijskih inženjera i tehnologa, 2017. - sign. 539(075.8) /KUR/ u
- Suvremeni materijali i postupci / uredio Tomislav Filetin. Zagreb : Hrvatsko društvo za materijale i tribologiju, 2005. - sign. 62 /SUV/ OP
Research Gate (30.03.2019.):
- Chopra, Jatin. (2014). Analysis of lithography based approaches in development of semiconductors. International Journal of Computer Science & Information Technology. 6. 10.5121/ijcsit.2014.6604.
- Mack, Chris. (2007). The Future of Semiconductor Lithography: After Optical, What Next?. Future Fab International. 23.
- C. Michael Garner. Lithography for enabling advances in integrated circuits and devices. Phil. Trans. R. Soc. A(2012)370, 4015–4041doi:10.1098/rsta.2011.0052
- Totzeck, Michael & Ulrich, Wilhelm & Göhnermeier, Aksel & Kaiser, Winfried. (2007). Semiconductor fabrication: Pushing deep ultraviolet lithography to its limits. Nature Photonics. 1. 629. 10.1038/nphoton.2007.218.
- Pease, Fabian & Chou, Stephen. (2008). Lithography and Other Patterning Techniques for Future Electronics. Proceedings of the IEEE. 96. 248 - 270. 10.1109/JPROC.2007.911853.
Google Patents:
- US5063586A. Apparatus for semiconductor lithography. / Tanya E. Jewell ; J. Michael Rodgers
Google Books:
- Wayne M Moreau. Semiconductor Lithography : Principles, Practices, and Materials. Boston, MA : Springer US, 1988.
Izvori na internetu (30.03.2019.):
- Definition: Semiconductor Lithography // Field Guide to Optical Lithography. / C. A. Mack. SPIE Press, Bellingham, WA (2006).
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